Intensity-based fiber optic pressure sensor with an Au/NiCr/Si3N4/SiO2/Si3N4 diaphragm

Jaehee Park; Myung Gyoo Kim; Yohee Kim; Kwangsoo Kim; Ilmin Kim

doi:10.1117/12.369355

11 November 1999 Intensity-based fiber optic pressure sensor with an Au/NiCr/Si₃ N₄/SiO₂/Si₃N4 diaphragm

Jaehee Park, Myung Gyoo Kim, Yohee Kim, Kwangsoo Kim, Ilmin Kim

Proceedings Volume 3897, Advanced Photonic Sensors and Applications; (1999) https://doi.org/10.1117/12.369355
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

Intensity based fiber optic pressure sensor has been fabricated using micromachining technology. The sensor consists of a multimode fiber bundle and a 100nm-Au/30nm- NiCr/150nm-Si₃N₄/300nm-SiO₂/150nm- Si₃N₄ diaphragms supported by a micromachined frame-shape silicon substrate. The distance between the fiber bundle and the diaphragm of the pressure sensor is 900 micrometers . Three fiber optic pressure sensor having different size diaphragms were fabricated and used in experiments. The pressure sensitivities were 20.69 nW/kPa, 26.70 nW/kPa, and 39.33 nW/kPa for the pressure sensor with diaphragms of 3 X 3 mm² area, 4 X 4 mm² area, and 5 X 5 mm² area.

Citation Download Citation

Jaehee Park, Myung Gyoo Kim, Yohee Kim, Kwangsoo Kim, and Ilmin Kim "Intensity-based fiber optic pressure sensor with an Au/NiCr/Si₃ N₄/SiO₂/Si₃N4 diaphragm", Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); https://doi.org/10.1117/12.369355

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