High-repetition-rate 157-nm mini excimer lasers

Andreas Goertler; Claus Strowitzki; Stephan Geiger

doi:10.1117/12.414083

25 January 2001 High-repetition-rate 157-nm mini excimer lasers

Andreas Goertler, Claus Strowitzki, Stephan Geiger

Proceedings Volume 4184, XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference; (2001) https://doi.org/10.1117/12.414083
Event: XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, 2000, Florence, Italy

Abstract

For new industrial applications, mini excimer lasers with a wavelength of 157 nm were developed. The main goal was to extend the component lifetime. The laser tube is designed in metal-ceramic technology. An erosion-free corona preionization is installed. The pulsed-power module contains a solid state switch with additional compression stages to generate the high current rise at the electrodes of the laser tube. All of the modules in the laser system are designed for long lifetime. At 157 nm the mini excimer laser reaches a maximum single-pulse energy of 2 mJ up to a repetition rate of 1000 Hz. An overview of the results of long-term testing of these stateÑofÑtheÑart mini excimer lasers at 157 nm will be given.

Citation Download Citation

Andreas Goertler, Claus Strowitzki, and Stephan Geiger "High-repetition-rate 157-nm mini excimer lasers", Proc. SPIE 4184, XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (25 January 2001); https://doi.org/10.1117/12.414083

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