XPS and RBS analysis of the composition and structure of barium titanate thin films to be used in DRAMs

Daniel Hernandez Cruz; Bendida Sahouli; Amir Tork; Emile J. Knystautas; Roger A. Lessard

doi:10.1117/12.429465

4 June 2001 XPS and RBS analysis of the composition and structure of barium titanate thin films to be used in DRAMs

Daniel Hernandez Cruz, Bendida Sahouli, Amir Tork, Emile J. Knystautas, Roger A. Lessard

Proceedings Volume 4296, Practical Holography XV and Holographic Materials VII; (2001) https://doi.org/10.1117/12.429465
Event: Photonics West 2001 - Electronic Imaging, 2001, San Jose, CA, United States

Abstract

We report the synthesis of polycrystalline barium titanate BaTiO₃ thin films on silicon substrate prepared by sol- gel technique. The structure and composition of ferroelectric film ms have been analyzed by using x-ray photoelectron spectroscopy and Rutherford backscattering spectroscopy. These methods provide information on the core level electronic states and the film composition. The results indicate the films have no distinctive deviation from the stoichiometry within the accuracy of both spectroscopic methods. Thus, this study of surface structure and composition of ferroelectric films could lead to a better understanding of the observed change of electrical and optical properties and to the design of improved devices such as dynamic random access memories.

Citation Download Citation

Daniel Hernandez Cruz, Bendida Sahouli, Amir Tork, Emile J. Knystautas, and Roger A. Lessard "XPS and RBS analysis of the composition and structure of barium titanate thin films to be used in DRAMs", Proc. SPIE 4296, Practical Holography XV and Holographic Materials VII, (4 June 2001); https://doi.org/10.1117/12.429465

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