Development of 65 X 1 uncooled membrane-type microbolometer array

V. G. Malyarov; Igor A. Khrebtov; A. D. Smirnov; L. S. Raguzina; V. Yu. Zerov; Yu. V. Kulikov; Igor I. Shaganov

doi:10.1117/12.407759

28 November 2000 Development of 65 X 1 uncooled membrane-type microbolometer array

V. G. Malyarov, Igor A. Khrebtov, A. D. Smirnov, L. S. Raguzina, V. Yu. Zerov, Yu. V. Kulikov, Igor I. Shaganov

Proceedings Volume 4340, 16th International Conference on Photoelectronics and Night Vision Devices; (2000) https://doi.org/10.1117/12.407759
Event: XVI International Conference on Photoelectronics and Night Vision Devices, 2000, Moscow, Russian Federation

Abstract

This paper presents the structure and technology of 65- elements linear array of membrane type microbolometers, and the research results of its properties. DC biased microbolometers with VO_x thermosensitive layer have detectivity of 5x10⁷ cm/Hz^1/2W at 12.5 Hz at 12.5 Hz frequency, and response time of 3 ms. The ways of improvement of developed linear array sensitivity are planed.

Citation Download Citation

V. G. Malyarov, Igor A. Khrebtov, A. D. Smirnov, L. S. Raguzina, V. Yu. Zerov, Yu. V. Kulikov, and Igor I. Shaganov "Development of 65 X 1 uncooled membrane-type microbolometer array", Proc. SPIE 4340, 16th International Conference on Photoelectronics and Night Vision Devices, (28 November 2000); https://doi.org/10.1117/12.407759

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