Improved crosslinkable polymeric binders for 193-nm bottom antireflective coatings (BARCs)

James D. Meador; Xie Shao; Mandar Bhave; Chris Cox; John Thompson; Debra L. Thomas; Stephen Gibbons; Ashley Farnsworth; Michael D. Rich

doi:10.1117/12.436918

24 August 2001 Improved crosslinkable polymeric binders for 193-nm bottom antireflective coatings (BARCs)

James D. Meador, Xie Shao, Mandar Bhave, Chris Cox, John Thompson, Debra L. Thomas, Stephen Gibbons, Ashley Farnsworth, Michael D. Rich

Author Affiliations +

Proceedings Volume 4345, Advances in Resist Technology and Processing XVIII; (2001) https://doi.org/10.1117/12.436918
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

The list of desired properties for a spin-on 193-nm BARC steadily increases. In response, crosslinkable polymers from different chemical families than the conventional acrylics and vinyls are being studied for applicability in preparing improved thermosetting BARCs. Alternate polymer platforms discussed in this paper include polyethers, polyesters, polyurethanes, and polysaccharides. A BARC that uses a blend or mixture of commercially-available polymers for the binder is highlighted and the product's performance is described. The BARC parameters that are discussed include film properties, flash point, optical data and reflectivity, solution and spin-bowl compatibility, plasma etching rate, resist profile, conformality, and metals content. Based on the test results outlined in this paper, the polymer blend BARC JM2218-56 is expected to advance towards commercialization.

Citation Download Citation

James D. Meador, Xie Shao, Mandar Bhave, Chris Cox, John Thompson, Debra L. Thomas, Stephen Gibbons, Ashley Farnsworth, and Michael D. Rich "Improved crosslinkable polymeric binders for 193-nm bottom antireflective coatings (BARCs)", Proc. SPIE 4345, Advances in Resist Technology and Processing XVIII, (24 August 2001); https://doi.org/10.1117/12.436918

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