Application of digital holographic microscopy for inspection of micro-optical components

Volker Kebbel; Hans-Juergen Hartmann; Werner P. O. Jueptner

doi:10.1117/12.445551

23 October 2001 Application of digital holographic microscopy for inspection of micro-optical components

Volker Kebbel, Hans-Juergen Hartmann, Werner P. O. Jueptner

Proceedings Volume 4398, Optical Measurement Systems for Industrial Inspection II: Application in Industrial Design; (2001) https://doi.org/10.1117/12.445551
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

Micro-optical components such as microlenses and microlens arrays are of growing interest in the fields of laser beam shaping, optical processing and similar applications. The characterization of these components require a fast and robust measurement technique, especially for simultaneous inspection of lenses manufactured in array structures e.g. on silicon wafers.

Citation Download Citation

Volker Kebbel, Hans-Juergen Hartmann, and Werner P. O. Jueptner "Application of digital holographic microscopy for inspection of micro-optical components", Proc. SPIE 4398, Optical Measurement Systems for Industrial Inspection II: Application in Industrial Design, (23 October 2001); https://doi.org/10.1117/12.445551

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