Stitching interferometry and absolute surface shape metrology: similarities

Michael Bray

doi:10.1117/12.453636

27 December 2001 Stitching interferometry and absolute surface shape metrology: similarities

Michael Bray

Proceedings Volume 4451, Optical Manufacturing and Testing IV; (2001) https://doi.org/10.1117/12.453636
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

Stitching interferometry is a method of analysing large optical components using a standard small interferometer. This result is obtained by taking multiple overlapping images of the large component, and numerically stitching these sub-apertures together by computing a correcting Tip- Tilt-Piston correction for each sub-aperture. All real-life measurement techniques require a calibration phase. By definition, a perfect surface does not exist. Methods abound for the accurate measurement of diameters (viz., the Three Flat Test). However, we need total surface knowledge of the reference surface, because the stitched overlap areas will suffer from the slightest deformation. One must not be induced into thinking that Stitching is the cause of this error: it simply highlights the lack of absolute knowledge of the reference surface, or the lack of adequate thermal control, issues which are often sidetracked... The goal of this paper is to highlight the above-mentioned calibration problems in interferometry in general, and in stitching interferometry in particular, and show how stitching hardware and software can be conveniently used to provide the required absolute surface shape metrology. Some measurement figures will illustrate this article.

Citation Download Citation

Michael Bray "Stitching interferometry and absolute surface shape metrology: similarities", Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); https://doi.org/10.1117/12.453636

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available