Mechanical gripper system for handling and assembly in MEMS

Dragan Petrovic; Gordana Popovic; Elias Chatzitheodoridis; Oscar Del Medico; Ana Almansa; Helmut Detter; Werner Brenner

doi:10.1117/12.442937

28 September 2001 Mechanical gripper system for handling and assembly in MEMS

Dragan Petrovic, Gordana Popovic, Elias Chatzitheodoridis, Oscar Del Medico, Ana Almansa, Helmut Detter, Werner Brenner

Proceedings Volume 4557, Micromachining and Microfabrication Process Technology VII; (2001) https://doi.org/10.1117/12.442937
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

Nowadays the application of specially designed grippers in micro technology is an important topic and a necessity for the industrialisation. In order to transfer the manual assembly of micro electro mechanical system (MEMS) to an automatic assembly process, specially designed handling tools with sensing capabilities are required. Keeping the dimensions of the microparts in mind the handling and assembly process requires supervision with microscopes, positioning with high precision and application of specially designed tools. This paper describes a miniaturised mechanical gripper system with specially designed grippers and with implemented force-feedback for general microassembly purpose. The described grippers are fabricated from spring steel by wire electro-discharge-machining (EDM). The design of the microgripping system allows handling of pieces with sizes from 10 micrometers up to 2 mm.

Citation Download Citation

Dragan Petrovic, Gordana Popovic, Elias Chatzitheodoridis, Oscar Del Medico, Ana Almansa, Helmut Detter, and Werner Brenner "Mechanical gripper system for handling and assembly in MEMS", Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); https://doi.org/10.1117/12.442937

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