Optical measurement methods for MEMS applications

Volker Grosser; C. Bombach; Wolf Faust; Dietmar Vogel; Bernd Michel

doi:10.1117/12.323337

29 September 1998 Optical measurement methods for MEMS applications

Volker Grosser, C. Bombach, Wolf Faust, Dietmar Vogel, Bernd Michel

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323337
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

Modern microelectronics, microsystems (MEMS and MOEMS) and their components are characterized by high volume integration of a variety of materials and combinations of materials to realize very different and variable functions (sensor and actuator functions, signal processing, etc.). The reliability and the lifetime of these microproducts are strongly depending on the material properties and the thermo-mechanical design. So nondestructive optical measuring and inspection methods are widely used in the R&D process, in IC-fabrication, in manufacturing and in packaging of MEMS and microcomponents. In following some special applications are described.

Citation Download Citation

Volker Grosser, C. Bombach, Wolf Faust, Dietmar Vogel, and Bernd Michel "Optical measurement methods for MEMS applications", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323337

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available