New developments in ALFT soft x-ray point sources

Dario F. Cintron; Xiaoming Guo; Meisheng Xu; Rubin Ye; Yuriy Antoshko; Steve Drew; Albert Philippe; Emilio Panarella

doi:10.1117/12.472354

1 July 2002 New developments in ALFT's soft x-ray point sources

Dario F. Cintron, Xiaoming Guo, Meisheng Xu, Rubin Ye, Yuriy Antoshko, Steve Drew, Albert Philippe, Emilio Panarella

Proceedings Volume 4688, Emerging Lithographic Technologies VI; (2002) https://doi.org/10.1117/12.472354
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

The new development in ALFT soft X-ray point source VSX-400 consists mainly of an improvement of the nozzle design to reduce the source size, as well as the introduction of a novel trigger system, capable of triggering the discharge hundreds of million of times without failure, and a debris removal system. Continuous operation for 8 hours at 20 kHz allows us to achieve 400 mW of useful soft X-ray radiation around 1 nm wavelength. In another regime of operation with a high energy machine, the VSX-Z, we have been able to achieve consistently 10 J of X-rays per pulse at a repetition rate that can reach 1 Hz with an input electrical energy of approximately 3 kJ and an efficiency in excess of 10-3.

Citation Download Citation

Dario F. Cintron, Xiaoming Guo, Meisheng Xu, Rubin Ye, Yuriy Antoshko, Steve Drew, Albert Philippe, and Emilio Panarella "New developments in ALFT's soft x-ray point sources", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); https://doi.org/10.1117/12.472354

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