Vibration-resistance technology of phase-shifting interferometry

Dong Wu; Jinbang Chen; Lei Chen; Ziming Wu; Wulantuya Lee

doi:10.1117/12.464059

20 September 2002 Vibration-resistance technology of phase-shifting interferometry

Dong Wu, Jinbang Chen, Lei Chen, Ziming Wu, Wulantuya Lee

Proceedings Volume 4927, Optical Design and Testing; (2002) https://doi.org/10.1117/12.464059
Event: Photonics Asia, 2002, Shanghai, China

Abstract

A vibration-resistance phase-shifting interferometer (PSI) was recently constructed and demonstrated. In this instrument, we have developed a method for actively compensating for vibration using a closed-loop phase servo system. An essential feature of this is phase modulating interference fringes fractionizing technology. This method can detect the fringe movement at 1/400 fringe interval, so fringes phase can be locked by the closed-loop feedback within 0.005 π. And the instrument implements phase shifting with the same piezoelectric transducer (PZT) that also compensates for vibration as feedback device. A microprogrammed control unit (MCU) is used to process phase information from photoelectric receiver, and then output the control signal to PZT driver. Experiments show that this solution is unique.

Citation Download Citation

Dong Wu, Jinbang Chen, Lei Chen, Ziming Wu, and Wulantuya Lee "Vibration-resistance technology of phase-shifting interferometry", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); https://doi.org/10.1117/12.464059

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