Paper
5 June 2003 Back-illuminated photodiodes for multislice CT
Randy P. Luhta, Rodney A. Mattson, Narayan Taneja, Peter Bui, Roar Vasbo
Author Affiliations +
Abstract
Conventional 2D photodiodes used in multislice CT detectors impose a limitation on the number of slices that can be achieved. The limitations encountered are in the number of metal lines that can be run between photodiode elements without significantly reducing the photodiode active area and in the density of wirebonds that can be accomodated at the edge of the chip. In addition, the photodiodes cannot easily be tiled in two directions due to the need for wirebonding on at least one edge. We have developed a 2D back illuminated photodiode array for multislice CT that overcomes the above limitations. The light sensitivity, sensitivity profiles, risetime, crosstalk, linearity and shunt resistance of the back illuminated photodiodes have been evaluated. The results show that these parameters either meet or exceed the specifications required for CT. The back illuminated photodiode represents an enabling technology for truly large area CT detection systems.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Randy P. Luhta, Rodney A. Mattson, Narayan Taneja, Peter Bui, and Roar Vasbo "Back-illuminated photodiodes for multislice CT", Proc. SPIE 5030, Medical Imaging 2003: Physics of Medical Imaging, (5 June 2003); https://doi.org/10.1117/12.480242
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CITATIONS
Cited by 23 scholarly publications and 6 patents.
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KEYWORDS
Photodiodes

Back illuminated sensors

Silicon

Crystals

Diffusion

Resistance

Sensors

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