Characterization of front- to backwafer alignment and bulk micromachining using electrical overlay test structures

Henk W. van Zeijl; John Slabbekoorn

doi:10.1117/12.499104

24 April 2003 Characterization of front- to backwafer alignment and bulk micromachining using electrical overlay test structures

Henk W. van Zeijl, John Slabbekoorn

Author Affiliations +

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.499104
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

MEMS device fabrication can benefit from accurate front- to backwafer alignment (FTBA) using Wafersteppers. To characterize FTBA an electrical overlay test structure is designed and fabricated to measure front- to backwafer overlay in a bulk micromachining process. Only two lithographic steps are required to fabricate these devices. The conductive film on the frontwafer, TiN, is virtually insensitive for mechanical damage during backwafer processing, and features a low etch rate in anisotropic KOH etching (2.4 nm/hr). Both FTBA overlay and FTBA CD variations are measured. The measurements shows that the front to backwafer overlay accuracy in bulk micro machining are limited by non-lithographic process errors.

Citation Download Citation

Henk W. van Zeijl and John Slabbekoorn "Characterization of front- to backwafer alignment and bulk micromachining using electrical overlay test structures", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.499104

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available