Low-temperature InOx thin films for O3 and NO2 gas sensing

George Kiriakidis; Hassan Ouacha; N. Katsarakis; Kosmas Galatsis; Wojtek Wlodarski

doi:10.1117/12.501464

24 April 2003 Low-temperature InO_x thin films for O₃ and NO₂ gas sensing

George Kiriakidis, Hassan Ouacha, N. Katsarakis, Kosmas Galatsis, Wojtek Wlodarski

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.501464
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

The desirable electrical properties of InO_x thin films and their response towards oxidizing gases has promoted InO_x to be recognized as a promising material for gas sensors. In this study, InO_x films in the thickness range of 10-1000 nm were deposited onto Corning 7059 glass substrates by dc magnetron sputtering. Their structural, electrical, and O₃ and NO₂ sensing properties were analyzed. Structural investigations carried out by XRD and AFM showed a strong correlation between crystallinity, surface topology and gas sensitivity. Moreover, the electrical conductivity exhibited a change of over six orders of magnitude during the processes of photoreduction and oxidation. The films deposited on alumina transducers were calibrated towards O₃ and NO₂ at temperatures from 50-300 °C. The sensors show promising characteristics as they exhibited reproducible and stable responses. The 50 nm thin film had a response of over 10 towards 50 ppb of ozone operating at 50°C, while the 20 nm film had a response of over 22 towards 0.1 ppm of NO₂ at 100°C.

Citation Download Citation

George Kiriakidis, Hassan Ouacha, N. Katsarakis, Kosmas Galatsis, and Wojtek Wlodarski "Low-temperature InO_x thin films for O₃ and NO₂ gas sensing", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.501464

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available