Recent progress in electron beam mastering for 100Gb/in2 and beyond

Motohiro Furuki; Minoru Takeda; Masanobu Yamamoto; Kimihiro Saito; Masataka Shinoda; Toshihiro Fujiki; Yuichi Aki; Mitsuru Koizumi; Toshiaki Miyokawa; Masao Muto

doi:10.1117/12.562121

9 September 2004 Recent progress in electron beam mastering for 100Gb/in² and beyond

Motohiro Furuki, Minoru Takeda, Masanobu Yamamoto, Kimihiro Saito, Masataka Shinoda, Toshihiro Fujiki, Yuichi Aki, Mitsuru Koizumi, Toshiaki Miyokawa, Masao Muto

Author Affiliations +

Proceedings Volume 5380, Optical Data Storage 2004; (2004) https://doi.org/10.1117/12.562121
Event: Optical Data Storage Topical Meeting, 2004, Monterey, California, United States

Abstract

We improved the electron beam recorder with a differential pumping head for higher density discs and mass production. The beam diameters were improved by exchanging the aperture size of the objective lens and beam stability were also improved by adding a sound proof case. As for the performance of the improved electron beam recorder, we showed that a 104Gb/in² (150GB capacity/layer) density disc with EFM plus modulation codes can be fabricated. We also improved the pit shape uniformity and a margin of the process by introducing the appropriate write strategy that is simulated by the Monte Carlo simulation to the recording pulses.

Citation Download Citation

Motohiro Furuki, Minoru Takeda, Masanobu Yamamoto, Kimihiro Saito, Masataka Shinoda, Toshihiro Fujiki, Yuichi Aki, Mitsuru Koizumi, Toshiaki Miyokawa, and Masao Muto "Recent progress in electron beam mastering for 100Gb/in² and beyond", Proc. SPIE 5380, Optical Data Storage 2004, (9 September 2004); https://doi.org/10.1117/12.562121

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