Characterization of optical accelerometers based on SU-8

A. Llobera; V. Seidemann; J. A. Plaza; V. J. Cadarso; S. Büttgenbach

doi:10.1117/12.623057

30 September 2005 Characterization of optical accelerometers based on SU-8

A. Llobera, V. Seidemann, J. A. Plaza, V. J. Cadarso, S. Büttgenbach

Proceedings Volume 5956, Integrated Optics: Theory and Applications; 59560W (2005) https://doi.org/10.1117/12.623057
Event: Congress on Optics and Optoelectronics, 2005, Warsaw, Poland

Abstract

The characterization and optimization of a quad beam all-polymer optical accelerometer is presented in this paper. The working principle is based in the intensity modulation, due to the misalignment between three waveguides when acceleration is applied. Analytical, mechanical and optical simulations predict a high sensitivity of the proposed devices. Optimization of both the seismic mass/mechanical beams joint and the sacrificial layer are also presented. Experimental results shows an optical sensitivity of at least 15.8 dB/g, with an asymmetrical behavior attributable to a small misalignment between the waveguides when no acceleration is applied.

Citation Download Citation

A. Llobera, V. Seidemann, J. A. Plaza, V. J. Cadarso, and S. Büttgenbach "Characterization of optical accelerometers based on SU-8", Proc. SPIE 5956, Integrated Optics: Theory and Applications, 59560W (30 September 2005); https://doi.org/10.1117/12.623057

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available