Error separating and correcting method of nanometer two-dimensional working table

Hongtao Yang; Yetai Fei; Xiaohuai Chen; Qi Wang; Feixiang Jin

doi:10.1117/12.716299

13 October 2006 Error separating and correcting method of nanometer two-dimensional working table

Hongtao Yang, Yetai Fei, Xiaohuai Chen, Qi Wang, Feixiang Jin

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62802S (2006) https://doi.org/10.1117/12.716299
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

The designing principle's analysis and the structure design using modern accuracy design concept of nanometer two dimension working table are introduced. The source of the uncertainty is overall analyzed. The error separating and correcting method is designed. The influence on the measurement result of the autocollimator and the interferometer produced by the angle error of the orthogonal prism is analyzed on principle. The preview experiments are done. The results indicate that the light path deflection using orthogonal prism has no influence on the error separating result, but without absolute zero position has obvious influence on the error separating result. The error correcting result shows that the precision demand of nanometer two-dimensional working table can be met.

Citation Download Citation

Hongtao Yang, Yetai Fei, Xiaohuai Chen, Qi Wang, and Feixiang Jin "Error separating and correcting method of nanometer two-dimensional working table", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62802S (13 October 2006); https://doi.org/10.1117/12.716299

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available