Method for testing aspheric surface with wavelength scanning interferometry

Changxi Xue; Furong Huo; Huiying Lv

doi:10.1117/12.783208

27 November 2007 Method for testing aspheric surface with wavelength scanning interferometry

Changxi Xue, Furong Huo, Huiying Lv

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67231V (2007) https://doi.org/10.1117/12.783208
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

In this paper, present test methods of optical aspherical surfaces are presented. The paper studies mainly a new kind of measurement method of aspherical surfaces-laser wavelength scanning interference test method. This research is aiming at putting forward a wavelength scanning interference test method. Processing and analyzing instantly-read interference patterns corresponding to continuous variable wavelength, the method overcomes the following disadvantages. For example, the longer reference arm, optical measurement environment in big-scale and high-accuracy aspheric testing and sensitive interferometer test system to disturbance, such as the oscillation of worktable, disturbance of air, and so on. Here, the authors describe the principle of elementary design of experiment device, and curtly introduce the method and principle for interference fringe processing. At the same time, this method and interferometric measurement instruments are studied and developed. We can not only perform surface test of high-precision aspheric surface, promote the application of aspheric, but also we can improve the integration of digital image processing, application of CCD and optical test.

Citation Download Citation

Changxi Xue, Furong Huo, and Huiying Lv "Method for testing aspheric surface with wavelength scanning interferometry", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67231V (27 November 2007); https://doi.org/10.1117/12.783208

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