Thin-line de-sense capability for database mode inspections with KLA-Tencor TeraScanHR

Arosha Goonesekera; Isaac Lee; Bo Mu; Aditya Dayal

doi:10.1117/12.793089

19 May 2008 Thin-line de-sense capability for database mode inspections with KLA-Tencor TeraScanHR

Arosha Goonesekera, Isaac Lee, Bo Mu, Aditya Dayal

Proceedings Volume 7028, Photomask and Next-Generation Lithography Mask Technology XV; 70282J (2008) https://doi.org/10.1117/12.793089
Event: Photomask and NGL Mask Technology XV, 2008, Yokohama, Japan

Abstract

Sub-resolution assist features (SRAF) are a common optical proximity correction method to preserve main feature patterns upon imaging into a photoresist during the lithographic process. The presence of SRAF can often reduce the inspectability and usable sensitivity in high resolution inspections of these reticles. KLA-Tencor has developed an improved Thin-Line De-sense capability for Die-to-Database inspections (dbTLD) on the TeraScanHR that addresses this challenge. The dbTLD capability provides sensitivity control focused on SRAF, thus improving inspectability without compromising high sensitivity to main features. The key feature of the improved dbTLD capability is that it provides greater flexibility to effectively de-sense non-critical defects on SRAF in variable sizes oriented at any angle and in variety of shapes including challenging L- and U-shaped structures. This paper will demonstrate the value of dbTLD on improving inspectability where aggressive SRAF structures exist. The selective application of sensitivity on main features and assist features is the key to improvement in database inspections without impacting throughput.

Citation Download Citation

Arosha Goonesekera, Isaac Lee, Bo Mu, and Aditya Dayal "Thin-line de-sense capability for database mode inspections with KLA-Tencor TeraScanHR", Proc. SPIE 7028, Photomask and Next-Generation Lithography Mask Technology XV, 70282J (19 May 2008); https://doi.org/10.1117/12.793089

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