Actinic review of EUV masks

Heiko Feldmann; Johannes Ruoff; Wolfgang Harnisch; Winfried Kaiser

doi:10.1117/12.848380

20 March 2010 Actinic review of EUV masks

Heiko Feldmann, Johannes Ruoff, Wolfgang Harnisch, Winfried Kaiser

Proceedings Volume 7636, Extreme Ultraviolet (EUV) Lithography; 76361C (2010) https://doi.org/10.1117/12.848380
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

Management of mask defects is a major challenge for the introduction of EUV for HVM production. Once a defect has been detected, its printing impact needs to be predicted. Potentially the defect requires some repair, the success of which needs to be proven. This defect review has to be done with an actinic inspection system that matches the imaging conditions of an EUV scanner. During recent years, several concepts for such an aerial image metrology system (AIMS™) have been proposed. However, until now no commercial solution exists for EUV. Today, advances in EUV optics technology allow envisioning a solution that has been discarded before as unrealistic. We present this concept and its technical cornerstones.While the power requirement for the EUV source is less demanding than for HVM lithography tools, radiance, floor space, and stability are the main criteria for source selection. The requirement to emulate several generations of EUV scanners demands a large flexibility for the ilumination and imaging systems. New critical specifications to the EUV mirrors in the projection microscope can be satisfied using our expertise from lithographic mirrors. In summary, an EUV AIMS™ meeting production requirements seems to be feasible.

Citation Download Citation

Heiko Feldmann, Johannes Ruoff, Wolfgang Harnisch, and Winfried Kaiser "Actinic review of EUV masks", Proc. SPIE 7636, Extreme Ultraviolet (EUV) Lithography, 76361C (20 March 2010); https://doi.org/10.1117/12.848380

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