Generation of superfine structure smaller than 10 nm by interfering femtosecond laser processing

Y. Nakata; K. Momoo; T. Hiromoto; N. Miyanaga

doi:10.1117/12.881184

21 February 2011 Generation of superfine structure smaller than 10 nm by interfering femtosecond laser processing

Y. Nakata, K. Momoo, T. Hiromoto, N. Miyanaga

Proceedings Volume 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI; 79200B (2011) https://doi.org/10.1117/12.881184
Event: SPIE LASE, 2011, San Francisco, California, United States

Abstract

Interfering femtosecond laser can induce periodic induction of energy on a thin film deposited on a substrate, and periodic thermal process is induced. This results in liquid motion of target, such as melting, inflation, flow and shrink, and then it freezes due to temperature fall by thermal radiation and conduction. The resultant structures are nanobump, nano-whisker, nano-waterdrop, nano-crown, and the shapes can be controlled by laser fluence, thin film thickness, substrate material, etc.. The size of some structures is smaller than 10 nm in curvature radius, and the aspect ratio is over 20. In addition, duplicated structure of two shapes, or double density structures can be generated in a single shot of laser irradiation by controlling the phase shift and power ratio between interfering beams. In the case of duplicated structure, the density of nano-structures is doubled, and two different nano-structures appear alternately. These structures will be useful in nanotechnology, especially in meta-material technology.

Citation Download Citation

Y. Nakata, K. Momoo, T. Hiromoto, and N. Miyanaga "Generation of superfine structure smaller than 10 nm by interfering femtosecond laser processing", Proc. SPIE 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, 79200B (21 February 2011); https://doi.org/10.1117/12.881184

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