Paper
23 December 2011 Simulation of crosstalk and quantum efficiency in high-resolution UV-blue imaging arrays
Author Affiliations +
Proceedings Volume 8204, Smart Nano-Micro Materials and Devices; 82042X (2011) https://doi.org/10.1117/12.903295
Event: SPIE Smart Nano + Micro Materials and Devices, 2011, Melbourne, Australia
Abstract
The current development of UV-Blue sensitive photo-detectors has lead to investigations with the polywell-stacked gradient poly-homojunction (StaG) configuration. Backwall illumination is of interest due to increased fill factor and pixel wavelength band tailoring. The StaG architecture has benefits. However, for benefit to backwall illumination the space charge region needs to be depleted to the backwall, possibly dispensing with the need for the StaG multi-layer. This research is an initial investigation of the benefit to crosstalk and sensitivity of the deep single well in high resolution, 5 μm pitch, photodiode arrays. The results indicate that geometries that are of fabricatable morphology can benefit backwall illumination especially in the U/V-blue wavelength spectrum.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul V. Jansz and Steven Hinckley "Simulation of crosstalk and quantum efficiency in high-resolution UV-blue imaging arrays", Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 82042X (23 December 2011); https://doi.org/10.1117/12.903295
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KEYWORDS
Photodiodes

Quantum efficiency

Imaging arrays

Back illuminated sensors

Diffusion

Image resolution

Doping

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