Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering

M. Trost; S. Schröder; C. C. Lin; A. Duparré; A. Tünnermann

doi:10.1117/12.929887

19 October 2012 Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering

M. Trost, S. Schröder, C. C. Lin, A. Duparré, A. Tünnermann

Proceedings Volume 8501, Advances in Metrology for X-Ray and EUV Optics IV; 85010F (2012) https://doi.org/10.1117/12.929887
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

Optical components for the extreme ultraviolet (EUV) face stringent requirements for surface finish, because even small amounts of surface and interface roughness can cause significant scattering losses and impair image quality. In this paper, we investigate the roughness evolution of Mo/Si multilayers by analyzing the scattering behavior at a wavelength of 13.5 nm as well as taking atomic force microscopy (AFM) measurements before and after coating. Furthermore, a new approach to measure substrate roughness is presented, which is based on light scattering measurements at 405 nm. The high robustness and sensitivity to roughness of this method are illustrated using an EUV mask blank with a highspatial frequency roughness of as low as 0.04 nm.

Citation Download Citation

M. Trost, S. Schröder, C. C. Lin, A. Duparré, and A. Tünnermann "Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering", Proc. SPIE 8501, Advances in Metrology for X-Ray and EUV Optics IV, 85010F (19 October 2012); https://doi.org/10.1117/12.929887

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available