Concept, realization and performance of a two-beam phase-shifting point diffraction interferometer

Nikolay Voznesenskiy; Mariia Voznesenskaia; Natalia Petrova; Artur Abels

doi:10.1117/12.2020618

13 May 2013 Concept, realization and performance of a two-beam phase-shifting point diffraction interferometer

Nikolay Voznesenskiy, Mariia Voznesenskaia, Natalia Petrova, Artur Abels

Proceedings Volume 8788, Optical Measurement Systems for Industrial Inspection VIII; 878805 (2013) https://doi.org/10.1117/12.2020618
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

Interferometric inspection of optical surfaces and wavefronts requires permanently increasing accuracy. Therefore interferometric equipment is being improved and improved continuously. Point-diffraction interferometers (PDI) with an “inbuilt” reference wavefront originating from light diffraction by a pinhole aperture are potentially capable to produce the highest possible accuracy of a surface figure or wavefront characterization. The most mentioned configurations and their versions like Linnik-Smart and Sommargren schemes produce low-contrast spare-striped fringe patterns instead of full-contrast distinct interferograms, like e.g. produced by Fizeau interferometers, with clear phase shifting (PS) data flow. The concept of a PDI presented in this paper is to provide two perpendicularly outgoing wavefronts – test and reference ones – with mutual intensity regulation and arbitrary and stable phase shifts of one wavefront relative to the other. Such concept is also targeted to provide user-friendly measuring conditions similarly to interferometers which are in common use. Advantages of such arrangement of the PDI are: high numerical aperture (NA = 0.55), clear fringe patterns of high contrast, high accuracy of surface figure testing with wave-front RMS error 0.125 nm and wave-front RMS repeatability 0.05 nm. Performance of the PDI is illustrated by tables of repeatability and test surface profile plots for different azimuthal angles.

Citation Download Citation

Nikolay Voznesenskiy, Mariia Voznesenskaia, Natalia Petrova, and Artur Abels "Concept, realization and performance of a two-beam phase-shifting point diffraction interferometer", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 878805 (13 May 2013); https://doi.org/10.1117/12.2020618

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
13 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Wavefronts

Fringe analysis

Picosecond phenomena

Distortion

Phase shifts

Interferometry

Interferometers

Show All Keywords

Keywords/Phrases

Search In:

Publication Years