Paper
22 September 2014 Surface structure of fused silica revealed by thermal annealing
Jun Yang, Kui Yi, Minghong Yang, Guohang Hu, Jianda Shao
Author Affiliations +
Abstract
Experiments showed that high density point and linear bulges emerged on the surface of fused silica after thermal annealing in an oven. To analyze the source of annealing bulges , the surface morphology was studied by atomic force microscopy, and the depth profile of impurities were analyzed by secondary ion mass spectroscopy. The results showed that impurities in redeposition layer migrated from subsurface to surface during annealing. The potential of using thermal annealing to reveal surface structure was developed.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jun Yang, Kui Yi, Minghong Yang, Guohang Hu, and Jianda Shao "Surface structure of fused silica revealed by thermal annealing", Proc. SPIE 9238, Pacific Rim Laser Damage 2014: Optical Materials for High-Power Lasers, 92380F (22 September 2014); https://doi.org/10.1117/12.2073479
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Annealing

Silica

Ions

Etching

Aluminum

Cerium

Iron

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