A fast and practical calibration method for the phase measuring profilometry

Lei Wu; Yanshan Xiao; Zi Liu; Longfei Han

doi:10.1117/12.2181806

13 April 2015 A fast and practical calibration method for the phase measuring profilometry

Lei Wu, Yanshan Xiao, Zi Liu, Longfei Han

Proceedings Volume 9522, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part II; 95222J (2015) https://doi.org/10.1117/12.2181806
Event: Selected Proceedings of the Photoelectronic Technology Committee Conferences held August-October 2014, 2014, China, China

Abstract

In the traditional PMP calibration, the system calibration and phase measurement were performed dividedly, and the measurement result was the relative height to the reference plane. A fast calibration was proposed, in which two gauge blocks were used to replace the standard plane controlled by the mechanical shifting device in the traditional calibration, and fewer datum points were sampled from the surface of the gauge blocks to calibrate the system. With this method, both system calibration and phase measurement can be implemented simultaneously. The real height of the object relative to the supporting plane can be obtained when the supporting plane was not superposed on the reference. A cuboid block of normal height 14.00mm was successfully measured by this method. Its mean relative error was no more than 1.35% and the root-mean-square error was less than 0.15mm. The calibration of the PMP was simplified and became more flexible with the proposed method.

Citation Download Citation

Lei Wu, Yanshan Xiao, Zi Liu, and Longfei Han "A fast and practical calibration method for the phase measuring profilometry", Proc. SPIE 9522, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part II, 95222J (13 April 2015); https://doi.org/10.1117/12.2181806

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KEYWORDS

Calibration

Charge-coupled devices

Phase measurement

Imaging systems

3D metrology

Associative arrays

Digital Light Processing

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