Modeling and simulation of blazed grating based on MEMS scanning micro-mirror for NIR micro-spectrometer

Ying Zhou; Zhiyu Wen; Tingyan Yang; Hongjie Lei

doi:10.1117/12.2219830

5 November 2015 Modeling and simulation of blazed grating based on MEMS scanning micro-mirror for NIR micro-spectrometer

Ying Zhou, Zhiyu Wen, Tingyan Yang, Hongjie Lei

Author Affiliations +

Proceedings Volume 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015; 97952P (2015) https://doi.org/10.1117/12.2219830
Event: Selected Proceedings of the Photoelectronic Technology Committee Conferences held June-July 2015, 2015, Hefei, Suzhou, and Harbin, China

Abstract

Near infrared micro-spectrometer (NIRMS) as a vital detection equipment for various elements has been investigated over the last few years. Traditional MEMS NIRMS employs CCD array detectors for NIR spectrum collection and this leads to higher fabrication cost. In this paper, to ensure the higher diffraction efficiency as well as lower fabrication cost, a novel blazed grating based on MEMS scanning micro-mirror (SMM) is proposed. By our design method, the NIRMS needs only one single InGaAs detector photo diode to collect NIR spectrum and ensure the high diffraction efficiency. Our results show that the diffraction efficiency of the blazed grating is almost 50% and the peak value reaches to 90% in the range of 900-2,100 nm while the optical scanning angle is 14.2°.

Citation Download Citation

Ying Zhou, Zhiyu Wen, Tingyan Yang, and Hongjie Lei "Modeling and simulation of blazed grating based on MEMS scanning micro-mirror for NIR micro-spectrometer", Proc. SPIE 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015, 97952P (5 November 2015); https://doi.org/10.1117/12.2219830

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