Novel functionalities and applications of femtosecond 3D printing: gray scale lithography of complex microoptical structures

Harald Giessen

doi:10.1117/12.2615155

5 March 2022 Novel functionalities and applications of femtosecond 3D printing: gray scale lithography of complex microoptical structures

Harald Giessen

Author Affiliations +

Proceedings Volume PC12012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV; PC120120O (2022) https://doi.org/10.1117/12.2615155
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

We present novel fabrication methods for complex microoptics. Gray scale lithography enables the writing of complex microoptical doublet structures with unprecedented surface smoothness and without slicing steps. We demonstrate diffraction limited imaging performance. Interferometric wavefront measurement confirm wavefront aberrations below lambda/10. Furthermore, we present new applications using black photoresists for direct printing of hulls and aperture stops.These techniques enable printing of high-NA achromatic optical trapping objectives directly on fibers, forward and side-looking OCT objectives, highly efficient couplers from quantum dots into fibers, couplers for single photon quantum detectors, and high-NA miniature fiber endoscopes with unprecedented image quality.

Conference Presentation

Citation Download Citation

Harald Giessen "Novel functionalities and applications of femtosecond 3D printing: gray scale lithography of complex microoptical structures", Proc. SPIE PC12012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV, PC120120O (5 March 2022); https://doi.org/10.1117/12.2615155

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