Nanofabrication Of Quantum Coupled Devices

J. N. Randall; M. A. Reed; R. J. Matyi; T. M. Moore; R. J. Aggarwal; A. E. Wetsel

doi:10.1117/12.947402

16 August 1988 Nanofabrication Of Quantum Coupled Devices

J. N. Randall, M. A. Reed, R. J. Matyi, T. M. Moore, R. J. Aggarwal, A. E. Wetsel

Proceedings Volume 0945, Advanced Processing of Semiconductor Devices II; (1988) https://doi.org/10.1117/12.947402
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States

Abstract

A new generation of integrated circuits is foreseen in which quantum dots with discrete electronic states are used to construct logic and memory elements. Successful implementation of this technology will require significant improvements in semiconductor processing technology.

Citation Download Citation

J. N. Randall, M. A. Reed, R. J. Matyi, T. M. Moore, R. J. Aggarwal, and A. E. Wetsel "Nanofabrication Of Quantum Coupled Devices", Proc. SPIE 0945, Advanced Processing of Semiconductor Devices II, (16 August 1988); https://doi.org/10.1117/12.947402

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