Automated Laser-Diode Interferometry With Phase-Shift Stabilization

Yukihiro Ishii

doi:10.1117/12.962793

20 November 1989 Automated Laser-Diode Interferometry With Phase-Shift Stabilization

Yukihiro Ishii

Proceedings Volume 1163, Fringe Pattern Analysis; (1989) https://doi.org/10.1117/12.962793
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

A Twyman-Green phase-shifting interferometer with a laser diode (LD) source was constructed for testing an optical element. An automated interferometric system was developed in which the laser current is continuously changed to synchronize intensity data acquisition with vertical drive pulses of a charge-coupled device (CCD). The intensity of interference pattern is integrated with a CCD detector for intervals of one-quarter period of one fringe. A microcomputer calculates the phase to be measured. To avoid the mode instability of LD, a feedback interferometer with extra TTL electronics is made to stabilize the phase shift using the frequency tuning of LD. The experimental result is shown to measure the profile of a diamond-turned Al surfa-ce.

Citation Download Citation

Yukihiro Ishii "Automated Laser-Diode Interferometry With Phase-Shift Stabilization", Proc. SPIE 1163, Fringe Pattern Analysis, (20 November 1989); https://doi.org/10.1117/12.962793

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