Design and construction of the automated scatterometer for particle sizing

Y. Pérez-Moret; Javier A. Martínez; M. P. Hernández; J. O. Abad; R. Sis; E. Lo Gioudice; H. Yee-Madeira; J. A. Díaz-Góngora

doi:10.1117/12.899738

21 October 2011 Design and construction of the automated scatterometer for particle sizing

Y. Pérez-Moret, Javier A. Martínez, M. P. Hernández, J. O. Abad, R. Sis, E. Lo Gioudice, H. Yee-Madeira, J. A. Díaz-Góngora

Author Affiliations +

Proceedings Volume 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World; 801104 (2011) https://doi.org/10.1117/12.899738
Event: International Commission for Optics (ICO 22), 2011, Puebla, Mexico

Abstract

A design of a scatterometer is described for applications of Mie theory. The instrument comprises a goniometer, a lock-in amplifier, a laser, and a photomultiplier tube (PMT). An embedded control programmable hardware and Windows-based Virtual Instruments simplify the design of automation of the scatterometer. The software has been modularly designed to provide independent control of the stepper motor for the motion of goniometer arm, running and on-line displaying of angular scans, auto storage of the angular scan data. The obtained benefits include facilitation of advanced data-collection techniques and collection of higher quality data. Quasimonodisperse particle of the latex have been characterized with this set up. The measured size particles are close to the reported nominal values. This result indicated that the experimental setup warrants adequate quality measurement, which allows a reasonable solution to inverse problem.

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Y. Pérez-Moret, Javier A. Martínez, M. P. Hernández, J. O. Abad, R. Sis, E. Lo Gioudice, H. Yee-Madeira, and J. A. Díaz-Góngora "Design and construction of the automated scatterometer for particle sizing", Proc. SPIE 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World, 801104 (21 October 2011); https://doi.org/10.1117/12.899738

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