MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution

Guangya Zhou; Yu Du; Kelvin K. L. Cheo; Fook Siong Chau

doi:10.1117/12.901076

8 September 2011 MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution

Guangya Zhou, Yu Du, Kelvin K. L. Cheo, Fook Siong Chau

Proceedings Volume 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies; 819105 (2011) https://doi.org/10.1117/12.901076
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

Miniaturized low-power, high-speed scanners are tremendously useful in a variety of applications. Besides MEMS micromirrors, the in-plane vibratory grating scanner is a development in this area which possesses several unique features. The in-plane scanning mechanism minimizes the dynamic non-rigid-body out-of-plane deformation of the mirror surface, allowing for higher-resolution displays. The dispersive element permits splitting the incoming beam into its constituents for analysis. Coupling a grating platform to an in-plane moving structure is also useful for real-time motion measurement which would otherwise be difficult to pick-up. The past developments till the current design are explored in this paper. Possible alternative applications besides image display, for example spectral imaging and realtime motion sensing are also described.

Citation Download Citation

Guangya Zhou, Yu Du, Kelvin K. L. Cheo, and Fook Siong Chau "MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 819105 (8 September 2011); https://doi.org/10.1117/12.901076

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KEYWORDS

Diffraction gratings

Scanners

Diffraction

Mirrors

Micromirrors

Laser scanners

Microelectromechanical systems

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