Principle and applications of a new MOEMS spectrometer

Thomas Otto; Ray Saupe; Alexander Weiss; Volker Stock; Reinhard Bruch; Thomas Gessner

doi:10.1117/12.648909

23 January 2006 Principle and applications of a new MOEMS spectrometer

Thomas Otto, Ray Saupe, Alexander Weiss, Volker Stock, Reinhard Bruch, Thomas Gessner

Proceedings Volume 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV; 611409 (2006) https://doi.org/10.1117/12.648909
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

Near Infrared (NIR) spectroscopy has developed to an important and useful analysis method over the past years. The existence of compact, portable devices offers a lot of applications possibilities, even in harsh environments. Compact devices, mostly based on detector arrays, are quite costly caused by the expensive Indium Gallium Arsenide (InGaAs) detector arrays. By using MOEMS the set-up can be realised much more efficiently. With an adapted optical set-up detector arrays can be replaced by single element detectors. We have realised a new miniaturised spectrometer based on a scanning micro mirror. The mirror is combined with a diffraction grating and other optical components. It periodically disperses the polychromatic radiation into its spectral components. The radiation is measured by an InGaAs-single element detector, which can be thermoelectrically cooled depending on the application. The radiation coupling is possible either directly or by using fiber optics. It allows an easy attachment of substance samples for reflectance measurements as well as attenuated total reflection (ATR) probes, cuvette holders and flow cells. Lowest noise preamplifiers enable high-precise measurements over a wide dynamic range. With a spectral range of 1000 - 2100 nm and a spectral resolution of approx. 12 nm the device is able to fulfill various requirements. Applications for food stuff industry; clinical chemistry and identification of polymers were tested and will be discussed. Furthermore we will show the advanced optical and mechanical design. In addition advanced performance issues and reliability test results of the device will be reviewed.

Citation Download Citation

Thomas Otto, Ray Saupe, Alexander Weiss, Volker Stock, Reinhard Bruch, and Thomas Gessner "Principle and applications of a new MOEMS spectrometer", Proc. SPIE 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV, 611409 (23 January 2006); https://doi.org/10.1117/12.648909

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