Design of silicon-PPTMDS bio-MEMS by cold RPECVD

Bertrand Bocquet; Nour-Eddine Bourzgui; Yannick Guhel; Vianney Mille; Celine Vivien; Philippe Supiot

doi:10.1117/12.530790

23 December 2003 Design of silicon-PPTMDS bio-MEMS by cold RPECVD

Bertrand Bocquet, Nour-Eddine Bourzgui, Yannick Guhel, Vianney Mille, Celine Vivien, Philippe Supiot

Proceedings Volume 5345, Microfluidics, BioMEMS, and Medical Microsystems II; (2003) https://doi.org/10.1117/12.530790
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

An important activity is developed today in the field of biosensors and biochips. These sensors are used essentially in the detection and/or characterization of biological or chemical entities in complex media. The aim of this paper is the development of a new type of biosensors combining microfluidic components and millimeter or sub-millimeter wave (or THz or FIR) spectroscopy tools. Today, many different microsystems in the field of biology are realized in all polymers or in silicon with a bounding of silicon or glass. We have selected to deposit a Plasma Polymerized TetraMethylDiSiloxane (PPTMDS) on a silicon wafer. A new technological process based on cold remote nitrogen plasma allows us to obtain 50-80μm thick layers with a rigid texture and a very good link with silicon. This technological process is now well defined and is compatible with a classical microelectronic process for the deposition of the metallic planar waveguides. For the first time, measurements using an-in-house vectorial network analyzer (VNA) 140-220GHz are reported. Fairly good results have been obtained from impedance and propagation characteristics. These measurements allow us to determine the PPTMDS permittivity in this bandwidth. Thanks to this knowledge, we have designed a matched coplanar waveguide where a water droplet is deposited. An inversion model has been developed to retrieve the water permittivity and will be broadened to biological entities.

Citation Download Citation

Bertrand Bocquet, Nour-Eddine Bourzgui, Yannick Guhel, Vianney Mille, Celine Vivien, and Philippe Supiot "Design of silicon-PPTMDS bio-MEMS by cold RPECVD", Proc. SPIE 5345, Microfluidics, BioMEMS, and Medical Microsystems II, (23 December 2003); https://doi.org/10.1117/12.530790

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