Magnetic debris mitigation of a CO2 laser-produced Sn plasma

Yoshifumi Ueno; Georg Soumagne; Masato Moriya; Takashi Suganuma; Tamotsu Abe; Hiroshi Komori; Akira Endo; Akira Sumitani

doi:10.1117/12.771817

21 March 2008 Magnetic debris mitigation of a CO₂ laser-produced Sn plasma

Yoshifumi Ueno, Georg Soumagne, Masato Moriya, Takashi Suganuma, Tamotsu Abe, Hiroshi Komori, Akira Endo, Akira Sumitani

Author Affiliations +

Proceedings Volume 6921, Emerging Lithographic Technologies XII; 69212Z (2008) https://doi.org/10.1117/12.771817
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

We evaluated the characteristics of Sn debris generated by a CO₂ laser (10.6μm) produced plasma. Experiments were performed with bulk Sn-plate targets and Mo/Si multilayer mirror samples were used for debris analysis. We observed very thin and uniform Sn layers of nano/sub-nano size debris particles. The layer deposition rate at 120mm from the plasma is, without magnetic field, about 30nm per million shots. The fundamental magnetic field effect has been confirmed experimentally. The fast Sn ion flux was measured with Faraday cups and the signal decreased by more than 3 orders of magnitude applying a magnetic field of 1T. The Sn deposition on the Mo/Si multilayer mirror decreased in this case by a factor of 4. The contribution of the remaining neutral Sn particles is under study in order to decrease the deposition rate.

Citation Download Citation

Yoshifumi Ueno, Georg Soumagne, Masato Moriya, Takashi Suganuma, Tamotsu Abe, Hiroshi Komori, Akira Endo, and Akira Sumitani "Magnetic debris mitigation of a CO₂ laser-produced Sn plasma", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69212Z (21 March 2008); https://doi.org/10.1117/12.771817

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