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Proceedings Article

Structural and electrical properties of PLZT (8/65/35) thin films prepared by MOD method

[+] Author Affiliations
Jianqiang Luo, Weiguo Liu, Shun Zhou, Xiaotao Sun

Xi'an Technological Univ. (China)

Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79950G (February 17, 2011); doi:10.1117/12.888385
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From Conference Volume 7995

  • Seventh International Conference on Thin Film Physics and Applications
  • Junhao Chu; Zhanshan Wang
  • Shanghai, China | September 24, 2010

abstract

Pyroelectric lead lanthanum zirconnate titanate (PbLa8Zr65Ti35) thin films were prepared by a metal-organic decomposition (MOD) method on Pt(111)/Ti/SiO2/Si(100) substrate. After annealing at different temperatures with the same annealing time, the amorphous films were transformed into polycrystalline PLZT films. The phase formation and surface microstructure were investigated by X-ray diffraction (XRD) and atom force microscopy (AFM). The XRD data showed the formation of pervoskite phase at 650°C and indicated suppression of pyrochlore phase as temperature increasing. The PLZT pyroelectric sensor was fabricated based on sensitive barrier layer instead of the other type barrier layer. Finally, dielectric and pyroelectric coefficients was also measured.

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Citation

Jianqiang Luo ; Weiguo Liu ; Shun Zhou and Xiaotao Sun
"Structural and electrical properties of PLZT (8/65/35) thin films prepared by MOD method", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79950G (February 17, 2011); doi:10.1117/12.888385; http://dx.doi.org/10.1117/12.888385


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