studies on the dislocation densities of gallium nitride grown by MOCVD

Ravi Loganathan; Mathaiyan Jayasakthi; Ponnusamy Arivazhagan; Kandhasamy Prabakaran; Manavaimaran Balaji; Krishnan Baskar

doi:10.1117/12.926857

15 October 2012 Studies on the dislocation densities of gallium nitride grown by MOCVD

Ravi Loganathan, Mathaiyan Jayasakthi, Ponnusamy Arivazhagan, Kandhasamy Prabakaran, Manavaimaran Balaji, Krishnan Baskar

Author Affiliations +

Proceedings Volume 8549, 16th International Workshop on Physics of Semiconductor Devices; 85492Q (2012) https://doi.org/10.1117/12.926857
Event: 16th International Workshop on Physics of Semiconductor Devices, 2011, Kanpur, India

Abstract

Group III-V nitrides have become versatile semiconducting materials for short wavelength LEDs, high temperature transistors. The growth and device processing of these materials are significant due to unusually high bond energies of nitrides. Inspite of high dislocations densities in the order of 10⁹cm^-2 the optical and electronic devices based on nitrides show high performance compared to conventional semiconductor devices. Understanding of the behavior of dislocations in these materials structures are very important for the fabrication of devices. In the present study, GaN was grown on sapphire substrates using MOCVD. The dislocation density of GaN has been estimated by wet etching and HRXRD. The results have been correlated with the growth conditions. The dislocation density of the samples was found to be between 3.5x10⁹cm^-2 and 5.0x10⁸cm^-2.

Citation Download Citation

Ravi Loganathan, Mathaiyan Jayasakthi, Ponnusamy Arivazhagan, Kandhasamy Prabakaran, Manavaimaran Balaji, and Krishnan Baskar "Studies on the dislocation densities of gallium nitride grown by MOCVD", Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 85492Q (15 October 2012); https://doi.org/10.1117/12.926857

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available