Paper
22 June 1998 Silicon-based integrated Mach-Zehnder interferometer with acousto-optic modulation: a biosensor application
Christophe Gorecki, Eric Bonnotte, Kerstin Woerhoff, Hideki Kawakatsu
Author Affiliations +
Proceedings Volume 3419, Optoelectronic Materials and Devices; 34191E (1998) https://doi.org/10.1117/12.311037
Event: Asia Pacific Symposium on Optoelectronics '98, 1998, Taipei, Taiwan
Abstract
As a novel application of silicon-based integrated optics, the results of a compact Mach-Zehnder interferometer are presented. The deposition of a ZnO thin-film transducer on the reference arm of the interferometer transforms this optically passive device under an active sinusoidal phase modulation. This device will be used as an in situ biosensor.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christophe Gorecki, Eric Bonnotte, Kerstin Woerhoff, and Hideki Kawakatsu "Silicon-based integrated Mach-Zehnder interferometer with acousto-optic modulation: a biosensor application", Proc. SPIE 3419, Optoelectronic Materials and Devices, 34191E (22 June 1998); https://doi.org/10.1117/12.311037
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KEYWORDS
Biosensors

Mach-Zehnder interferometers

Silicon

Acousto-optics

Modulation

Integrated optics

Thin film devices

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