The influence factor analysis of misalignment variable in computer aided alignment

Chao Zhang; Xi-ting Zhao; Wen-chun Jiao

doi:10.1117/12.2067910

18 September 2014 The influence factor analysis of misalignment variable in computer aided alignment

Chao Zhang, Xi-ting Zhao, Wen-chun Jiao

Proceedings Volume 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 928218 (2014) https://doi.org/10.1117/12.2067910
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

The core of the computer aided alignment is aided alignment software installed. The accuracy of analysis and calculation by the software determines the optical adjustment’s precision directly. This paper analyzes the influence of misalignment variable’s precision through simulating the geometric parameters and the surface precision, then verified by some example. This method can help to improve the accuracy of optical adjustment and short the adjustment cycle.

Citation Download Citation

Chao Zhang, Xi-ting Zhao, and Wen-chun Jiao "The influence factor analysis of misalignment variable in computer aided alignment", Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 928218 (18 September 2014); https://doi.org/10.1117/12.2067910

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