Spectrum method for laser induced damage in dielectric thin films

Yue Cai; Meng-lian Zhou; Zhi-liang Ma; Li-jun Wang

doi:10.1117/12.2181798

4 May 2015 Spectrum method for laser induced damage in dielectric thin films

Yue Cai, Meng-lian Zhou, Zhi-liang Ma, Li-jun Wang

Proceedings Volume 9543, Third International Symposium on Laser Interaction with Matter; 95430C (2015) https://doi.org/10.1117/12.2181798
Event: Third International Symposium on Laser Interaction with Matter, 2014, Jiangsu, China

Abstract

This paper shows some tentative results with which laser induced damage on dielectric thin films is analyzed by using the transmission spectrum. The damage characters were extracted in high-resolution images of damaged films, and transmission spectrum of damaged thin films was measured. The mathematical model of transmission was built based on the matrix optics theory with the optical properties, which include the effective refractive index, effective extinction coefficient, effective thickness and wavelength, and so on. Changes of optical properties in different damaged degree were analyzed by the transmittance spectrum. Through which laser-induced damage mechanisms had been analyzed with the micro-examinations of films.

Citation Download Citation

Yue Cai, Meng-lian Zhou, Zhi-liang Ma, and Li-jun Wang "Spectrum method for laser induced damage in dielectric thin films", Proc. SPIE 9543, Third International Symposium on Laser Interaction with Matter, 95430C (4 May 2015); https://doi.org/10.1117/12.2181798

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