Surface profile measurement of highly reflective silicon wafer using wavelength tuning interferometer

Yangjin Kim; Naohiko Sugita; Mamoru Mitsuishi

doi:10.1117/12.2229090

8 March 2016 Surface profile measurement of highly reflective silicon wafer using wavelength tuning interferometer

Yangjin Kim, Naohiko Sugita, Mamoru Mitsuishi

Proceedings Volume 9778, Metrology, Inspection, and Process Control for Microlithography XXX; 97783L (2016) https://doi.org/10.1117/12.2229090
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

In phase-shifting Fizeau interferometers, phase-shift errors and multiple-beam interference are the most common sources of systematic error affecting high-precision phase measurements. Nonsinusoidal waveforms can be minimized by applying synchronous detection with more than four samples. However, when phase-shift calibration is inaccurate, these algorithms cannot eliminate the effects of nonsinusoidal characteristics. Moreover, when measuring the surface profile of highly reflective samples, the calculated phase is critically determined not only by the decrease in the fringe contrast, but also by the coupling error between the harmonics and phase-shift errors. In this study, we calculate phase errors using phase-shifting algorithms that take into account the coupling error. We show that the 4N – 3 algorithm, which consists of a polynomial window function and a discrete Fourier transform term, results in the smallest phase error. As a demonstration, the surface profile of a highly reflective silicon wafer is measured using a wavelength-tuning Fizeau interferometer and the 4N – 3 algorithm.

Citation Download Citation

Yangjin Kim, Naohiko Sugita, and Mamoru Mitsuishi "Surface profile measurement of highly reflective silicon wafer using wavelength tuning interferometer", Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 97783L (8 March 2016); https://doi.org/10.1117/12.2229090

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available