Time-resolved temperature measurement and numerical simulation of superposed pulsed Nd:YAG laser irradiated silicon

Xueming Lv; Yunxiang Pan; Zhichao Jia; Zhonghua Shen; Jian Lu; Xiaowu Ni

doi:10.1117/12.2266434

12 May 2017 Time-resolved temperature measurement and numerical simulation of superposed pulsed Nd:YAG laser irradiated silicon

Xueming Lv, Yunxiang Pan, Zhichao Jia, Zhonghua Shen, Jian Lu, Xiaowu Ni

Author Affiliations +

Proceedings Volume 10173, Fourth International Symposium on Laser Interaction with Matter; 101730D (2017) https://doi.org/10.1117/12.2266434
Event: 4th International Symposium on Laser Interaction with Matter, 2016, Chengdu, China

Abstract

Time-resolved surface temperature of single crystal silicon was measured by an infrared radiation pyrometer. The silicon sample was irradiated by two pulsed Nd:YAG lasers with pulse duration of 1ms superposed by 7ns pulses, referred to as combined pulse laser (CPL). The change of the damage radius with the millisecond (ms) laser energy density was studied, and then compared with that of single ms laser irradiation. An axisymmetric numerical model was established for calculation of the temperature field distribution while silicon was irradiated by single ms laser and CPL, respectively. Compared with experimental results, the CPL-silicon damage mechanism was discussed.

Citation Download Citation

Xueming Lv, Yunxiang Pan, Zhichao Jia, Zhonghua Shen, Jian Lu, and Xiaowu Ni "Time-resolved temperature measurement and numerical simulation of superposed pulsed Nd:YAG laser irradiated silicon", Proc. SPIE 10173, Fourth International Symposium on Laser Interaction with Matter, 101730D (12 May 2017); https://doi.org/10.1117/12.2266434

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