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The miniaturization technology of the FPD panel have been advanced continuously, and it is said that the
reducing rate is about 0.7 times for three years. Therefore, an exposure equipment of the 1.5 μm resolution
was released from manufacturers in 2016. As one of some methods to realize 1.5 μm resolution, change
from the broadband light to i-line single wavelength light has been selected.
However, it is known that CD uniformity is become large, when a conventional pellicle is used in i-line single
wavelength exposure[1]. Therefore, it is needed products suitable for i-line single wavelength exposure.
In this paper, influence of the pellicle is investigated between conventional pellicle and i-line pellicle.
Keywords：FPD, pellicle, i-line, resolution, CD uniformity.
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