Development of the reliable 20 kW class pulsed carbon dioxide laser system for LPP EUV light source

Junichi Fujimoto; Takeshi Ohta; Krzysztof M. Nowak; Takashi Suganuma; Hidenobu Kameda; Masato Moriya; Toshio Yokoduka; Koji Fujitaka; Akira Sumitani; Hakaru Mizoguchi

doi:10.1117/12.879181

8 April 2011 Development of the reliable 20 kW class pulsed carbon dioxide laser system for LPP EUV light source

Junichi Fujimoto, Takeshi Ohta, Krzysztof M. Nowak, Takashi Suganuma, Hidenobu Kameda, Masato Moriya, Toshio Yokoduka, Koji Fujitaka, Akira Sumitani, Hakaru Mizoguchi

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Proceedings Volume 7969, Extreme Ultraviolet (EUV) Lithography II; 79692S (2011) https://doi.org/10.1117/12.879181
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

Laser Produced Plasma (LPP) Extreme Ultra Violet (EUV) light source is expected to be used for next generation lithography. To realize such performance for industrial use, the main driver laser is one of the key components. Our source uses a high power pulsed carbon dioxide (CO₂) laser as a plasma driver. A master oscillator and a power amplifier (MOPA) system based on a new configuration of an RF-excited CO₂ laser is the key to high efficiency. This pulsed CO₂ laser system has started to operate. This report shows its initial performance. Also for a reliable industrial system, the optical instability caused by vibration and thermal distortion of optics should be suppressed at 20 kW output level. The primary design of key modules, such as mirrors, for the CO₂ laser, and dynamic design concepts are shown in this report. We have achieved 7.6 kW, 14 nsec, 100 kHz pulsed output in this configuration.

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Junichi Fujimoto, Takeshi Ohta, Krzysztof M. Nowak, Takashi Suganuma, Hidenobu Kameda, Masato Moriya, Toshio Yokoduka, Koji Fujitaka, Akira Sumitani, and Hakaru Mizoguchi "Development of the reliable 20 kW class pulsed carbon dioxide laser system for LPP EUV light source", Proc. SPIE 7969, Extreme Ultraviolet (EUV) Lithography II, 79692S (8 April 2011); https://doi.org/10.1117/12.879181

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