Sn film and ignition control for performance enhancement of laser-triggered DPP source

Yusuke Teramoto; Takuma Yokoyama; Hideyuki Urakami; Kazuaki Hotta

doi:10.1117/12.879512

8 April 2011 Sn film and ignition control for performance enhancement of laser-triggered DPP source

Yusuke Teramoto, Takuma Yokoyama, Hideyuki Urakami, Kazuaki Hotta

Proceedings Volume 7969, Extreme Ultraviolet (EUV) Lithography II; 79692V (2011) https://doi.org/10.1117/12.879512
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

A laser-triggered DPP source is being developed and showing considerable progress toward HVM. Performance, in terms of power and lifetime, of DPP sources has been proven by long-term usage in lithography development fields. Since high-performance debris-mitigation tools are used in DPP sources, collector lifetime is not an issue. However, it is worth developing the technology to enhance overall lifetime of the collector module. In order to suppress both neutral and ionic debris, two technologies, which can be simultaneously used in a DPP source, have been developed. First, a discharge ignition by using two lasers was developed. It was able to reduce the amount and energy of fast ions which could sputter a collector by a factor of 5. In addition to fast ion reduction, CE enhancement of 60 % was obtained. Second, an active control of liquid tin layer, which acts as a fuel material, electrode protection and cooling medium, could reduce particle debris and lower the load of a debris-mitigation tool. Implementing these technologies is considered to provide enhancement of the lifetime of the collector module and support HVM readiness.

Citation Download Citation

Yusuke Teramoto, Takuma Yokoyama, Hideyuki Urakami, and Kazuaki Hotta "Sn film and ignition control for performance enhancement of laser-triggered DPP source", Proc. SPIE 7969, Extreme Ultraviolet (EUV) Lithography II, 79692V (8 April 2011); https://doi.org/10.1117/12.879512

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