Uncooled micromachined bolometer arrays on flexible substrates

Shadi A. Dayeh; Donald P. Butler; Zeynep Celik-Butler; Patty Wisian-Neilson

doi:10.1117/12.487293

10 October 2003 Uncooled micromachined bolometer arrays on flexible substrates

Shadi A. Dayeh, Donald P. Butler, Zeynep Celik-Butler, Patty Wisian-Neilson

Proceedings Volume 5074, Infrared Technology and Applications XXIX; (2003) https://doi.org/10.1117/12.487293
Event: AeroSense 2003, 2003, Orlando, Florida, United States

Abstract

This paper reports progress on the development of micromachined infrared microsensors on flexible polymer substrates. The flexible substrates were formed by spin-coating polyimide films (HD Microsystems PI-5878G) on silicon wafer carriers. Semiconducting Yttrium Barium Copper Oxide (YBCO) was used as the thermistor. The microbolometer was fabricated using a polyimide (HD Microsystems PI2737) sacrificial mesa and titanium electrode arms. The YBCO thermistor was suspended above the substrate by the electrode arms after the sacrificial layers have been removed by micromachining. The polyimide substrate was then removed from the silicon wafer carrier to complete the fabrication of the infrared microsensors on a flexible polyimide substrate. The measured thermal conductance of the microbolometers ranged from 9.07 x 10^-6 W/K for a non-micromachined to 4.0 x 10^-7 W/K for a micromachined sensor. As a result, the responsivity and detectivity were measured to be as high as 6.1 x 10⁴V/W and a 1.2 x 10⁸ cmHz^1/2/W, respectively, with a 970 nA current bias. This level of performance is comparable to similar miromachined detectors fabricated on silicon substrates.

Citation Download Citation

Shadi A. Dayeh, Donald P. Butler, Zeynep Celik-Butler, and Patty Wisian-Neilson "Uncooled micromachined bolometer arrays on flexible substrates", Proc. SPIE 5074, Infrared Technology and Applications XXIX, (10 October 2003); https://doi.org/10.1117/12.487293

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available