Study on the optical property of the micro Fabry-Perot cavity tunable filter

Qinghua Meng; Sihai Chen; Luqing Wu; Shan Dong; Shiwei Bao

doi:10.1117/12.840675

26 October 2009 Study on the optical property of the micro Fabry-Perot cavity tunable filter

Qinghua Meng, Sihai Chen, Luqing Wu, Shan Dong, Shiwei Bao

Proceedings Volume 7516, Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration; 75160T (2009) https://doi.org/10.1117/12.840675
Event: Photonics and Optoelectronics Meetings 2009, 2009, Wuhan, China

Abstract

Pushbroom Hyperspectral Imager (PHI) is a new intensively researched subject in the spectral imaging field. Hyperspectral imaging is getting wide attention due to their high spectral resolution. The conventional imaging spectrometer uses prism and grating as dispersive component. As the Fabry-Perot (F-P) cavity has high resolution and excellent frequency selectivity, in this paper, MEMS F-P array filter is used as the light splitting device. It is compact, fast modulate rate, high precise and easy to be integrated. In this paper, the optical property of the integrated micro F-P cavity tunable filter has been studied. Optical thin film design software TFCalc has been adopted to design the optical thin film of the micro filter. Design and analysis of antireflection coatings, high reflection and the F-P cavity interference filter. The test results show that the optical properties of the fabricated samples are consistent with the design results. In order to simulate the working mechanism of the micro F-P cavity, two filters were fixed together to form an F-P cavity. The filter effect of the F-P cavity was tested using a spectrometer, the comb filter pattern was observed. The feasibility of the optical F-P cavity tunable filter is confirmed.

Citation Download Citation

Qinghua Meng, Sihai Chen, Luqing Wu, Shan Dong, and Shiwei Bao "Study on the optical property of the micro Fabry-Perot cavity tunable filter", Proc. SPIE 7516, Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration, 75160T (26 October 2009); https://doi.org/10.1117/12.840675

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available