Paper
21 November 2007 Design and fabrication of large-scale RB-SiC mirror
Yu-Feng Zhou, Yu-min Zhang, Jie-cai Han, Yuan-yuan Han, Wang Yao
Author Affiliations +
Proceedings Volume 6721, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes; 67210S (2007) https://doi.org/10.1117/12.782952
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China
Abstract
Large-scale mirror plays an important role in the field of science and technology. Just because of shortcomings of traditional materials, silicon carbide is tending to be the most potential material for large-scale mirror. Large-scale mirror is fabricated by three steps. The first step includes design and analysis of mirror. The second step is the preparation of mirror. The third step is machining, polishing and coatings. Some mirrors with sizes from 100 mm to 1m were prepared. The roughness is less than 3 nm rms. The wave-front error can be less than 1/40 wavelength rms. The reflectivity of the mirrors with Ag films is larger than 95%. In order to obtain smoother surface, a dense coatings with single phase material should be prepared. In this paper, silicon coatings were prepared by electronic beam physical vapor deposition and magnetron sputtering. The properties of coatings-substrate system were tested. The adherence strength of silicon coatings by electronic beam physical vapor deposition is between 15~20 g, and porosity is about 6%, and the adherence strength of silicon coatings by magnetron sputtering is between 20~40 g, and porosity is less than 2%. The silicon coatings by magnetron sputtering can be polished to a smooth surface. Some silicon carbide mirrors were prepared for the large pointer mirror and the primary mirror of the high resolution camera. Currently, experiments are under way to test the properties under the simulation space situation.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yu-Feng Zhou, Yu-min Zhang, Jie-cai Han, Yuan-yuan Han, and Wang Yao "Design and fabrication of large-scale RB-SiC mirror", Proc. SPIE 6721, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 67210S (21 November 2007); https://doi.org/10.1117/12.782952
Lens.org Logo
CITATIONS
Cited by 1 scholarly publication.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Mirrors

Silicon carbide

Silicon

Surface finishing

Polishing

Sputter deposition

Reflectivity

RELATED CONTENT

SiC coatings on RB SiC mirrors for ultrasmooth surfaces
Proceedings of SPIE (December 06 1993)
Lightweight mirrors from single-crystal silicon
Proceedings of SPIE (December 12 2003)
Protected silver coatings for low scatter SiC and SiC Si...
Proceedings of SPIE (December 12 2003)
Rapid fabrication of lightweight SiC mirror using CCOS
Proceedings of SPIE (August 18 2011)
Large Scale Fabrication Of Lightweight Si/SiC LIDAR Mirrors
Proceedings of SPIE (October 26 1989)
Surface modification of SiC mirror by IARE method
Proceedings of SPIE (February 18 2011)

Back to Top