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Proceedings Article

Development of a simple user-friendly commercial digital holographic microscope

[+] Author Affiliations
Oi Choo Chee, Vijay Raj Singh, Eddy Sim

Ngee Ann-AEM Ctr. of Innovation (Singapore)

Anand Asundi

Nanyang Technological Univ. (Singapore)

Proc. SPIE 6912, Practical Holography XXII: Materials and Applications, 69120V (January 25, 2008); doi:10.1117/12.760625
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From Conference Volume 6912

  • Practical Holography XXII: Materials and Applications
  • Hans I. Bjelkhagen; Raymond K. Kostuk
  • San Jose, CA | January 19, 2008

abstract

We report the development of a simple commercial digital holographic microscope. The hologram is recorded using a CCD sensor and numerically reconstructed to provide quantitative analysis of the object. The laser source is coupled via fibre optics and the opto-mechanical setup is flexible and customizable for either the reflection or transmission mode. The user-friendly software allows live reconstruction, simultaneously providing both the amplitude and phase images. System performance is improved with phase unwrapping and interferometric comparison. Additional features include various image enhancements, cross-sectional and line profiling, measurement and data analysis tools for quantitative 3D imaging and surface topography measurement. The performance of the product is tested on different micro devices, glass and silicon surfaces.

© (2008) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Oi Choo Chee ; Vijay Raj Singh ; Eddy Sim and Anand Asundi
"Development of a simple user-friendly commercial digital holographic microscope", Proc. SPIE 6912, Practical Holography XXII: Materials and Applications, 69120V (January 25, 2008); doi:10.1117/12.760625; http://dx.doi.org/10.1117/12.760625


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