New feasibilities for characterizing rough surfaces by optical correlation techniques

Oleg V. Angelsky; Peter P. Maksimyak

doi:10.1117/12.519637

30 September 2003 New feasibilities for characterizing rough surfaces by optical correlation techniques

Proceedings Volume 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies; (2003) https://doi.org/10.1117/12.519637
Event: 2003 Chapter books, 2003, Bellingham, WA, United States

Abstract

New feasibilities are considered for optical correlation diagnostics of rough surfaces with different distributions of irregularities. The influence of deviations of the height surface roughness distribution from a Gaussian probability distribution on the accuracy of optical analysis is discussed. The possibilities for optical diagnostics of fractal surface structures are shown and the set of statistical and dimensional parameters of the scattered fields for surface roughness diagnostics us determined. Finally, a multifunctional measuring device for estimation of these parameters is proposed.

Citation Download Citation

Oleg V. Angelsky and Peter P. Maksimyak "New feasibilities for characterizing rough surfaces by optical correlation techniques", Proc. SPIE 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, (30 September 2003); https://doi.org/10.1117/12.519637

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available